Method of making a pressure transducer apparatus
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United States of America Patent
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Jun 11, 1996
Issued Date -
N/A
app pub date -
Apr 7, 1994
filing date -
Nov 6, 1992
priority date (Note) -
Expired
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Abstract
A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.
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- 15 United States
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- 5 Korea
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Patent Owner(s)
- TEXAS INSTRUMENTS INCORPORATED
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Lukasiewicz, Stanley J | Rumford, RI | 9 | 158 |
Padovani, Francois A | Westwood, MA | 14 | 956 |
Shukla, Vishwa N | North Attleboro, MA | 7 | 114 |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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