Protective overlayer material and electro-optical coating using same
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United States of America Patent
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Jun 25, 1996
Grant Date -
N/A
app pub date -
May 31, 1995
filing date -
May 31, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An electro-optical device comprising a series of thin films with an electrically controllable optical state provided with a protective overlayer that has a high optical transmittance and high resistance to penetration by H.sub.2 O. The protective overlayer is a film of amorphous silicon oxycarbide (a-SiOC:H) having an O to C ratio such that the optical absorption edge of the a-SiOC:H is 3 eV or greater and the H.sub.2 O transport through a 500 nm thick film of a-SiOC:H is 10.sup.12 molecules/cm.sup.2 -s or less.
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