Particle monitor for throttled pumping systems
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United States of America Patent
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-
Jul 9, 1996
Grant Date -
N/A
app pub date -
Mar 7, 1994
filing date -
Mar 7, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method for accomplishing particle monitoring above the throttle valve of a turbo pump provides a particle sensor which is built into the throttle valve in such a way that it is insensitive to local plasma glows. Furthermore, the particle sensor is placed such that a particle monitoring laser beam of the particle sensor is offset from the centerline of the pipe, so as to maximize exposure to process gas flow which is diverted to the periphery of the pipe by the position of a butterfly valve plate.
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