Device for exciting a plasma to electron cyclotron resonance by means of a wire applicator of a static magnetic field and of a microwave field
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United States of America Patent
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Jul 16, 1996
Grant Date -
N/A
app pub date -
Feb 25, 1994
filing date -
Feb 25, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a plasma excitation device comprising at least one electrically conductive wire applicator fed form an energy source in the microwave range and means for creating a magnetic field and adapted to create at least one surface having a constant magnetic field of a flux density that corresponds to electron cyclotron resonance. According to the invention, the wire applicator includes the means for creating the magnetic field, with the main component thereof being situated in a cross-section of the applicator and extending over at least a fraction of the length of the applicator, said applicator thus constituting an applicator both of a microwave electric field and of a static magnetic field.
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