Sensor for articles such as wafers on end effector
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United States of America Patent
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Jul 23, 1996
Grant Date -
N/A
app pub date -
May 7, 1993
filing date -
May 7, 1993
priority date (Note) -
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Abstract
The presence of an article at a specified location is detected by measuring a change in capacitance which is caused by the placement of the article at the specified location. The device used for this measurement includes an oscillator the frequency whereof is rendered highly sensitive to the capacitance being measured by structure which includes a triaxial cable and by electrical circuitry which includes a voltage follower circuit.
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