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Abstract

A method and system have been described for simultaneously controlling one or multiple metrics of non-uniformity using a model form independent multi-variable controller. The method comprising: utilizing process models relating a plurality of product quality parameters to the plurality of process control variables; measuring a plurality of product quality parameters on a first plurality of products; exercising statistical quality control tests on the plurality of product quality parameters of the first plurality of products; continuing processing if statistical quality control tests do not indicate significant difference from model prediction and observables; otherwise measuring the plurality of product quality parameters on a second plurality of products; tuning the process models to create tuned process models using the plurality of product quality parameters from the first and the second plurality of products, wherein the tuning estimates a changed state of the processing with the use of process models; estimating new values for the plurality of process control variables from the tuned models; processing a third plurality of products at the new values of the plurality of process control variables; measuring the plurality of product quality parameters on the third plurality of products; repeating the tuning of the process models and the estimating new values for the plurality of process control variables if the quality control parameters from the third plurality of products are not acceptable; otherwise continuing processing products with the new values of the plurality of process control variables if the quality control parameters from the third plurality of products are acceptable. The process models may include site models, wherein the site models would model metrics of non-uniformity and asymmetry as functions of sites.

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First Claim