Multiple wavelength polarization-modulated ellipsometer with phase-generated carrier
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United States of America Patent
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Aug 20, 1996
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N/A
app pub date -
Sep 23, 1994
filing date -
Sep 23, 1994
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Expired
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Abstract
A method and apparatus for analyzing a sample wherein at least two orthogonally polarized, intensity and phase modulated laser beams with different wavelengths and frequencies of intensity and phase modulation are directed onto the sample, and the signals derived from the laser beams which interact with the sample are synchronously demodulated to determine characteristics of the sample such as index of refraction, absorption coefficient and film thickness. A reference beam can be provided to correct for noise and drift.
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