Methods and apparatus for determining interstitial oxygen content of relatively large diameter silicon crystals by infrared spectroscopy
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United States of America Patent
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Aug 27, 1996
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N/A
app pub date -
May 12, 1994
filing date -
May 12, 1994
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Expired
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Abstract
Nondestructive methods and apparatus for determining a concentration of interstitial oxygen in a generally cylindrical body of crystalline silicon. The invention transmits an infrared (IR) beam through the body generally transverse to a longitudinal axis of the body and measures the absorption coefficient of an interstitial oxygen absorption band at a wavenumber W.sub.p of approximately 1720 cm.sup.-1. Further, the invention determines the concentration of interstitial oxygen in the body as a function of the measured absorption coefficient.
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