Method and means for controlling movement of a chuck in a test apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 27, 1996
Grant Date -
N/A
app pub date -
Jul 5, 1994
filing date -
Jul 5, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A sense circuit (23) for generating an actuating signal and a method of using the actuating signal to control movement of a wafer chuck (12). The sense circuit (23) has sense input terminals (24, 28) coupled to corresponding probe-card probes (19, 18). A wafer (26) having contact pads (42, 42') is mounted on the wafer chuck (12) and moved towards the probe-card probes (18, 19). When the probe-card probes (18, 19) contact corresponding contact pads (42', 42) on the wafer, the sense circuit (23) generates an actuating signal. The actuating signal, which is generated in accordance with the heights of the contact pads (42', 42), enables control circuit (48) of the prober (11). The control circuit limits the movement of the wafer chuck (12) to prevent damage to the probe card (12) or the wafer (26).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully