Micromachined measuring cell with arm supported sensor
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United States of America Patent
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Sep 3, 1996
Issued Date -
N/A
app pub date -
Jan 27, 1995
filing date -
Nov 23, 1992
priority date (Note) -
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Abstract
A micromachined measuring cell is adapted to be mounted on a support and has a measuring sensor (121) and an assembly structure (120) distinct from one another and associated with each other by a connecting arm (128). At least one part element (103b) of the assembly structure, one part (133) of the connecting arm and one part (103a) of the sensor (121) are produced as one single piece. The assembly structure (120) of this measuring cell is preferably in the shape of a frame surrounding the sensor (121).
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