Notch finder having a flexible alignment rod
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United States of America Patent
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Sep 3, 1996
Grant Date -
N/A
app pub date -
Oct 11, 1995
filing date -
Oct 11, 1995
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An orientation apparatus for aligning indexing notches of disk-shaped members, such as semiconductor wafers, includes a flexible alignment rod that imparts rotation of the disk-shaped members until the indexing notches are registered with the alignment rod. The alignment rod is captured by a displaceable comb member that exposes regions of the rod between adjacent teeth. The teeth ensure that the disk-shaped members are properly aligned. The comb member has a raised operation position in which the disk-shaped members are spaced apart from rollers and has a lowered retracted position in which the weight of the disk-shaped members is transferred to the rollers. A camming mechanism may be used to raise and lower the comb member and alignment rod between the two positions.
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