Electro-micro-mechanical shutters on transparent substrates
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United States of America Patent
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Sep 3, 1996
Grant Date -
N/A
app pub date -
Sep 7, 1993
filing date -
Sep 7, 1993
priority date (Note) -
Expired
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Abstract
A micro-mechanical shutter array using micro-mechanical technology and silicon-on-transparent-substrate technology. The micro-mechanical shutter array is operated by using electro-static forces. Two basic types of shutter movements are described, viz. an electric force/electric counter-force and an electric force/mechanical (spring) counter-force.
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