Gas friction vacuum pump having at least three differently configured pump stages releasably connected together
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United States of America Patent
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-
Sep 10, 1996
Grant Date -
N/A
app pub date -
Nov 16, 1994
filing date -
May 16, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention relates to a gas friction vacuum pump having at least two differently configured pump stages each having a rotor section and a housing section. In order to adapt the pump to different applications, the pump stages are detachably connected with each other so that different inlet stages can be mounted on the high-vacuum side.
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