Method for improving adhesion to a spin-on-glass
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United States of America Patent
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Sep 10, 1996
Grant Date -
N/A
app pub date -
Sep 1, 1994
filing date -
Sep 1, 1994
priority date (Note) -
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Abstract
A method is described for eliminating problems of adhesion, including peeling and blistering, between the surface of a cured spin- on-glass layer and a second deposited layer of a different material. After curing, and prior to the deposition of the second layer, the layer of spin-on-glass is subjected to a short heat treatment in vacuum. The second layer is then deposited without breaking the vacuum.
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