Apparatus for removing particulate matter
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United States of America Patent
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-
Sep 24, 1996
Issued Date -
N/A
app pub date -
Sep 2, 1994
filing date -
Jul 23, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for controlling the effective velocity of a spray of cleaning material in order to remove particulate matter and other contamination from a surface of a workpiece. The surface under treatment is moved relative to the position of a sprayhead in order to increase or reduce the velocity at which the spray impacts the surface. In one embodiment, the workpiece is mounted on a disk-shaped support plate. The sprayhead tracks across the support plate to direct the spray over the entire workpiece. The support plate is rotated towards the sprayhead to increase the effective spray velocity, and away from the sprayhead to decrease the effective spray velocity. Another embodiment of the invention adjusts the speed of rotation of the support plate in such a manner that the spray maintains a constant effective velocity as the sprayhead is moved radially across the support plate.
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