Coaxial wafer probe with tip shielding
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United States of America Patent
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Oct 15, 1996
Issued Date -
N/A
app pub date -
May 12, 1995
filing date -
Jul 20, 1994
priority date (Note) -
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Abstract
A shielded microwave probe tip assembly includes an end of a coaxial cable coupled to probe fingers forming a coplanar controlled impedance microwave transmission line where the ground probe fingers are interconnected by a shield member that is spaced apart from the signal line probe finger but is positioned between the signal line probe finger and a device under test. The shield prevents the generation of extraneous signals or parasitic coupling from the device under test which would otherwise degrade measurement accuracy.
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