Method of inspecting a workpiece surface including a picturing system with a shortened focal plane
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United States of America Patent
Stats
-
Oct 15, 1996
Grant Date -
N/A
app pub date -
Nov 17, 1994
filing date -
Nov 22, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A workpiece surface is measured to detect a defective portion with a projection and a depression on the workpiece surface by using an optical inspecting apparatus having a projector for radiating a detecting light towards the workpiece surface and a picturing device for receiving a reflected light from the workpiece surface. A reflected light from the workpiece surface is pictured in a condition in which a focal surface of the picturing device is positioned away from the workpiece surface to the side of the picturing device relative to an entire region of that effective inspecting range of the workpiece surface from which the picturing device can receive the reflected light. The defective portion on the workpiece surface is detected from a dark portion which appears on the image of the picturing device.
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Cited Art Landscape
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