Ionization gauge having a non-time varying magnetic field generator of separated opposed magnets
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United States of America Patent
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Oct 22, 1996
Issued Date -
N/A
app pub date -
Mar 31, 1995
filing date -
Apr 28, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A cold cathode ionization gauge includes a first and second electrode spaced apart and insulated from one another and having a common axis. A magnetic field generator surrounds the gauge and applies a non-time varying magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets adjacent each other. In one embodiment of the invention a non-magnetic annular spacer is placed between the opposed magnets. The magnet arrangement minimizes magnetic flux outside of the gauge while increasing the strength of the magnetic flux inside of the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.
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