Microfabricated acoustic source and receiver
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Oct 29, 1996
Issued Date -
N/A
app pub date -
Sep 14, 1994
filing date -
Jun 4, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microstructure that may be used as an acoustic source or receiver. It comprises a substrate having a thicker section and a thinner section, supporting a membrane. A window is formed in the thinner section. Means are provided for inputting or sensing mechanical energy in the substrate and membrane. The microstructure allows for the design of complex mechanical frequency responses for at least partly mechanical signal processing.
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Cited Art Landscape
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