Human guided mobile loader stocker
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United States of America Patent
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Nov 5, 1996
Grant Date -
N/A
app pub date -
Nov 5, 1993
filing date -
Nov 5, 1993
priority date (Note) -
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status (Latency Note)
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Abstract
A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.
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