Heat treatment method and apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5571010
SERIAL NO

08262057

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An object holder is raised, a mount portion is stopped at a middle stop position higher than a lower stop position, and an object of treatment is preheated. Thereafter, the object holder is further raised, the mount portion is stopped at an upper stop position in a processing tube higher than the middle position, and the object is heat-treated. A first temperature sensor for measuring a temperature on the obverse side of the object on the mount portion is located facing the obverse side. A second temperature sensor for measuring a temperature on the reverse side of the object on the mount portion is located facing the reverse side. The temperature of the object is detected in accordance with the respective outputs of the first and second temperature sensors. A secondary heat source is provided such that it emits secondary radiant heat rays toward the reverse of the object in a treatment position when it is heated by means of a primary heat source in the processing tube, thereby heating at least the peripheral edge portion of the object.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okase, Wataru Sagamihara, JP 38 1290

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