Spiral heater for use in czochralski crystal pullers
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United States of America Patent
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Nov 5, 1996
Issued Date -
N/A
app pub date -
Jun 7, 1995
filing date -
Jun 1, 1993
priority date (Note) -
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Abstract
The invention defines an apparatus for controlling oxygen content in Czochralski silicon crystal pullers in which silicon is melted in a quartz crucible. The apparatus includes a susceptor 10, a quartz crucible 12 in said susceptor, a cable 16 for lowering a seed crystal 14 into silicon melted in said crucible, and a combination spiral heater/magnetic coil 25 for heating and melting silicon in said crucible, and for producing a magnetic field around the crucible.
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