Rotary-cup coating apparatus
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United States of America Patent
Stats
-
Nov 5, 1996
Grant Date -
N/A
app pub date -
Jul 20, 1994
filing date -
Jul 26, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
When a cylinder unit is actuated to extent its rod upwardly, a chuck is lifted above an inner cup to receive a planar workpiece such as a semiconductor wafer or a glass substrate. The chuck is now disengaged from the inner cup, and a stopper locks the chuck against rotation. After the planar workpiece has been supported on the chuck, the cylinder unit is actuated to retract its rod, bringing the chuck into its lowered position. The chuck is now engaged by the inner cup for corotation. Energization of a motor rotates the inner cup, which then rotates the chuck. Since the inner cup, which has a relatively large rotational inertia, is driven by the motor, interengaging portions of the inner cup and the chuck are less susceptible to damage.
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Cited Art Landscape
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