Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus
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United States of America Patent
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-
Nov 5, 1996
Issued Date -
N/A
app pub date -
Jun 7, 1995
filing date -
Dec 21, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate processing apparatus comprises a processing part and a transferring part. In the processing part there are a plurality of stages in which a plurality of processing units are arranged in a row along a horizontal direction and the stages are arranged in a stack vertically. Thus, the processing units are arranged in matrix. The transferring part includes a plurality of horizontal transferring devices each movable in the horizontal direction and a vertical transferring device movable in the vertical direction. Hence, a substrate is movable both horizontally and vertically to be transferred to the desired processing unit.
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