Load lock chamber for vertical type heat treatment apparatus
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United States of America Patent
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-
Nov 5, 1996
Grant Date -
N/A
app pub date -
Sep 19, 1994
filing date -
Nov 13, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention is a load lock chamber for a vertical type heat treatment apparatus which has no elevating device which requires the provision of lubricating oil which is a source of particles causing contamination in the chamber. Below a treatment chamber, an intermediate chamber is arranged. A support stand is provided below a boat table for supporting the objects to be processed, which can be loaded into or unloaded from the treatment chamber gastightly through the intermediate chamber. This support stand is mounted on a member movable vertically by means of a feed screw. A bellows is mounted between the intermediate chamber and the movable member.
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Cited Art Landscape
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