Pressure sensor
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United States of America Patent
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Nov 5, 1996
Grant Date -
N/A
app pub date -
Mar 28, 1994
filing date -
Mar 30, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A pressure sensor based on electrostatic capacity method is disclosed, which comprises the main body of a pressure sensing element having one end surface as a pressured face and the other end surface as a back, for detecting the pressure of a measurement fluid acting on the pressured face, a seal member, a measure pattern on the back, and a one-chip IC. For size reduction, an input-output policy is provided near the main body of the pressure sensing element, and it effects input and output with respect to the pressure sensing element main body while preventing external disturbances and improving the accuracy of measurement.
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