Importance

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Abstract

A seal for use in a gap between two non-contacting solid members, comprises a pool of fluid, the pool being anchored in a first of the members and contacting the second of the members, the pool being detachable from the second member in response to a pressure differential within the gap, and a bearing in a gap between two solid members used in a micromechanical pump, comprising a disk member suspended between the non-contacting solid members, and a pool of a first liquid between a first of the solid members and a first surface of the disk member, a second fluid in contact with a second surface of the disk member, the second fluid being dielectric, and an electrical potential applied across the disk member and the second fluid, the disk member being moveable in response to the electrical potential.

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First Claim