Use of incompatible materials to eliminate sticking of micro-mechanical devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5576878
SERIAL NO

08220429

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of preventing adhesion of contacting surfaces of micro-mechanical devices (10). Two materials are selected that are incompatible in the sense that they have at least low solid solubility and preferably, an inability to alloy. One of these materials is used as the first contacting surface (11), and the other as the second contacting surface (17).

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD MS 3999 DALLAS TX 75243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Henck, Steven A Plano, TX 17 501

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