Importance

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Abstract

A downflow spin dryer, includes a housing; a rotor rotating within the housing in a direction of rotation, the rotor including first and second opposite mounting holes at different heights; a cradle fitted within the rotor for accommodating semiconductor substrates to be dried, the cradle having a rear portion and a front portion as viewed with respect to the direction of rotation of the rotor, the cradle being fitted to the rotor such that the rear portion of the cradle is at a lower position than the front portion of the cradle, the cradle including first and second opposite mounting holes in alignment with the first and second mounting holes, respectively, of the rotor when the cradle is fitted within the rotor, the first and second mounting holes of the cradle being at the same height; screws for entering the first mounting holes of the cradle and the rotor, and for entering the second mounting holes of the cradle and the rotor, so as to mount the cradle within the rotor; an air inlet in an upper surface of the housing above the rotor through which air is sucked along with the rotation of the rotor; an air outlet in the housing through which air sucked through the air inlet is discharged; and a filter over the air inlet to prevent incursion of dust into the dryer.

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First Claim