Scanning light exposure apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5579147
SERIAL NO

08354715

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A scanning light exposure apparatus comprises illumination optical systems for radiating light beams to a plurality of sub-areas in a pattern area of a mask, a plurality of projection optical systems arranged along a predetermined direction for projecting erected images of unity magnification of the sub-areas by the light beams transmitted through the mask onto a photo-sensitive substrate, a diaphragm member arranged at a substantially conjugate position to the photo-sensitive substrate in each illumination optical system for limiting a projection area of the sub-area to the photo-sensitive substrate, scanning means for synchronously scanning said mask and said photo-sensitive substrate substantially transversely to the predetermined direction relative to said projection optical systems and diaphragm control means for changing a width of an aperture of each diaphragm member along a direction transverse to the predetermined direction.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
NIKON CORPORATIONTOKYO5012

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mori, Susumu Tokyo, JP 51 651
Naraki, Tsuyoshi Tokyo, JP 13 455

Cited Art Landscape

Patent Info (Count) # Cites Year
 
CANON KABUSHIKI KAISHA (3)
* 4350431 Projecting device 8 1980
* 5172189 Exposure apparatus 20 1991
* 5359389 Exposure apparatus including two illuminating systems and exposure process using the same 27 1993
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (2)
* 2005/0239,352 PERSONAL WATERCRAFT AIR INTAKE ASSEMBLY 0 2004
* 2006/0244,805 Multicolor pen 3 2005
 
ASML NETHERLANDS B.V. AND ASML HOLDING N.V. (3)
8159647 Lithographic apparatus and device manufacturing method 1 2008
* 2009/0168,072 Illumination System 1 2008
* 2009/0091,734 Illumination System 4 2008
 
NIKON CORPORATION (25)
* 5729331 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 49 1995
* 5715037 Scanning exposure apparatus 42 1996
* 5985496 Exposure method and apparatus 3 1997
* 5920378 Projection exposure apparatus 18 1997
* 6051842 Illumination optical apparatus with optical integrator 19 1998
6351305 Exposure apparatus and exposure method for transferring pattern onto a substrate 10 1998
6266131 Exposure apparatus 53 1999
6556278 Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted 10 2000
6509954 Aperture stop having central aperture region defined by a circular ARC and peripheral region with decreased width, and exposure apparatus and method 7 2000
6480262 Illumination optical apparatus for illuminating a mask, method of manufacturing and using same, and field stop used therein 11 2000
6795169 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 249 2003
* 2003/0137,644 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 3 2003
7023527 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 4 2004
* 2005/0012,917 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 2 2004
7088425 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 9 2005
* 2005/0185,162 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 1 2005
7372543 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 4 2006
* 2006/0238,729 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 1 2006
9195069 Illumination optical apparatus, exposure apparatus, and device manufacturing method 0 2007
* 2008/0246,932 Exposure apparatus, device manufacturing method and exposure method 6 2007
* 2007/0258,077 Illumination optical apparatus, exposure apparatus, and device manufacturing method 10 2007
7372544 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 4 2007
7956984 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 1 2008
* 8384875 Exposure apparatus, exposure method, and method for producing device 0 2009
* 2010/0079,743 Exposure apparatus, exposure method, and method for producing device 2 2009
 
ASML HOLDING N.V. AND ASML NETHERLANDS B.V. (4)
7400382 Light patterning device using tilting mirrors in a superpixel form 15 2005
* 2006/0245,033 Light patterning device using tilting mirrors in a superpixel form 15 2005
7683300 Using an interferometer as a high speed variable attenuator 0 2006
* 2008/0117,494 Using an interferometer as a high speed variable attenuator 1 2006
 
DAINIPPON SCREEN MFG. CO., LTD. (2)
7728954 Reflective loop system producing incoherent radiation 1 2006
* 2007/0279,611 Reflective loop system producing incoherent radiation 0 2006
 
Tropel Corporation (1)
* 5982475 Raster-scan photolithographic reduction system 26 1997
 
MICRONIC LASER SYSTEMS AB (2)
7460208 Lithographic apparatus and device manufacturing method 2 2005
* 2006/0187,428 Lithographic apparatus and device manufacturing method 3 2005
 
ASML NETHERLANDS B.V. (271)
6995830 Lithographic projection apparatus and device manufacturing method 9 2003
* 2005/0134,819 Lithographic projection apparatus and device manufacturing method 8 2003
7190434 Lithographic apparatus and device manufacturing method 3 2004
7133118 Lithographic apparatus and device manufacturing method 6 2004
* 2005/0179,884 Lithographic apparatus and device manufacturing method 4 2004
* 2005/0179,882 Lithographic apparatus and device manufacturing method 1 2004
7081947 Lithographic apparatus and device manufacturing method 37 2004
7016014 Lithographic apparatus and device manufacturing method 0 2004
* 2005/0190,353 Lithographic apparatus and device manufacturing method 6 2004
* 2005/0190,354 Lithographic apparatus and device manufacturing method 0 2004
7061586 Lithographic apparatus and device manufacturing method 6 2004
* 2005/0195,380 Lithographic apparatus and device manufacturing method 2 2004
7094506 Lithographic apparatus and device manufacturing method 8 2004
6967711 Lithographic apparatus and device manufacturing method 33 2004
* 2005/0200,819 Lithographic apparatus and device manufacturing method 0 2004
* 2005/0200,820 Lithographic apparatus and device manufacturing method 5 2004
7561251 Lithographic apparatus and device manufacturing method 3 2004
* 2005/0213,067 Lithographic apparatus and device manufacturing method 11 2004
7053981 Lithographic apparatus and device manufacturing method 9 2004
* 2005/0219,497 Lithographic apparatus and device manufacturing method 4 2004
7002666 Lithographic apparatus and device manufacturing method 1 2004
* 2005/0231,701 Lithographic apparatus and device manufacturing method 0 2004
* 2005/0243,295 Lithographic apparatus and device manufacturing 5 2004
7183566 Lithographic apparatus for manufacturing a device 2 2004
* 2005/0006,563 Lithographic apparatus, method of calibrating, and device manufacturing method 1 2004
* 2005/0012,916 Lithographic apparatus and device manufacturing method 5 2004
7385675 Lithographic apparatus and device manufacturing method 10 2004
* 2005/0007,572 Lithographic apparatus and device manufacturing method 15 2004
7477403 Optical position assessment apparatus and method 2 2004
* 2005/0275,840 Optical position assessment apparatus and method 4 2004
7123348 Lithographic apparatus and method utilizing dose control 3 2004
6989886 Lithographic apparatus and device manufacturing method 0 2004
* 2005/0270,515 Lithographic apparatus and device manufacturing method 18 2004
* 2005/0270,512 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 0 2004
7630118 Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method 4 2004
7016015 Lithographic apparatus and device manufacturing method 4 2004
* 2005/0018,997 Lithographic apparatus and device manufacturing method 1 2004
* 2005/0007,671 Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method 18 2004
7239393 Calibration method for a lithographic apparatus and device manufacturing method 0 2004
* 2005/0024,643 Calibration method for a lithographic apparatus and device manufacturing method 0 2004
7154587 Spatial light modulator, lithographic apparatus and device manufacturing method 3 2004
7016016 Lithographic apparatus and device manufacturing method 1 2004
* 2005/0024,613 Spatial light modulator, lithographic apparatus and device manufacturing method 0 2004
7116403 Lithographic apparatus and device manufacturing method 20 2004
7158208 Lithographic apparatus and device manufacturing method 18 2004
7116404 Lithographic apparatus and device manufacturing method 6 2004
* 2006/0001,855 Lithographic apparatus and device manufacturing method 25 2004
7573574 Lithographic apparatus and device manufacturing method 1 2004
* 2006/0012,763 Lithographic apparatus and device manufacturing method 3 2004
7259829 Lithographic apparatus and device manufacturing method 3 2004
* 2006/0017,903 Lithographic apparatus and device manufacturing method 7 2004
7142286 Lithographic apparatus and device manufacturing method 1 2004
7251020 Lithographic apparatus and device manufacturing method 3 2004
* 2006/0023,192 Lithographic apparatus and device manufacturing method 2 2004
7538855 Lithographic apparatus and device manufacturing method 0 2004
* 2006/0035,160 Lithographic apparatus and device manufacturing method 0 2004
7500218 Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same 8 2004
7304718 Lithographic apparatus and device manufacturing method 0 2004
* 2006/0040,187 Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same 6 2004
* 2006/0038,969 Lithographic apparatus and device manufacturing method 2 2004
7116402 Lithographic apparatus and device manufacturing method 25 2004
* 2005/0200,821 Lithographic apparatus and device manufacturing method 7 2004
7079225 Lithographic apparatus and device manufacturing method 3 2004
7411652 Lithographic apparatus and device manufacturing method 8 2004
* 2005/0068,510 Lithographic apparatus and device manufacturing method 5 2004
7109498 Radiation source, lithographic apparatus, and device manufacturing method 0 2004
7177012 Lithographic apparatus and device manufacturing method 22 2004
* 2006/0082,752 Lithographic apparatus and device manufacturing method 6 2004
7196772 Lithographic apparatus and device manufacturing method 2 2004
7116398 Lithographic apparatus and device manufacturing method 1 2004
* 2005/0145,805 Lithographic apparatus and device manufacturing method 1 2004
* 2005/0118,528 Lithographic apparatus and device manufacturing method 1 2004
7388663 Optical position assessment apparatus and method 7 2004
7609362 Scanning lithographic apparatus and device manufacturing method 1 2004
* 2006/0098,175 Lithographic apparatus and device manufacturing method 2 2004
* 2005/0243,298 Lithographic apparatus and device manufacturing method 8 2004
7170584 Lithographic apparatus and device manufacturing method 2 2004
7061581 Lithographic apparatus and device manufacturing method 3 2004
* 2006/0110,665 Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus 7 2004
7333177 Lithographic apparatus and device manufacturing method 2 2004
* 2006/0114,446 Lithographic apparatus and device manufacturing method 15 2004
7391499 Lithographic apparatus and device manufacturing method 1 2004
* 2006/0119,825 Lithographic apparatus and device manufacturing method 3 2004
7362415 Lithographic apparatus and device manufacturing method 4 2004
* 2006/0119,815 Lithographic apparatus and device manufacturing method 6 2004
7355677 System and method for an improved illumination system in a lithographic apparatus 0 2004
* 2006/0126,047 Lithographic apparatus and device manufacturing method 1 2004
7349068 Lithographic apparatus and device manufacturing method 0 2004
7180577 Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane 1 2004
* 2006/0132,751 Lithographic apparatus and device manufacturing method utilizing an microlens array at a image plane 0 2004
* 2006/0132,742 Lithographic apparatus and device manufacturing method 0 2004
7391676 Ultrasonic distance sensors 1 2004
7375795 Lithographic apparatus, device manufacturing method, and device manufactured thereby 0 2004
7256867 Lithographic apparatus and device manufacturing method 0 2004
7230677 Lithographic apparatus and device manufacturing method utilizing hexagonal image grids 2 2004
7202939 Lithographic apparatus and device manufacturing method 3 2004
* 2006/0132,746 Lithographic apparatus and device manufacturing method utilizing hexagonal image grids 4 2004
* 2006/0132,735 Lithographic apparatus, device manufacturing method, and device manufactured thereby 4 2004
* 2006/0132,750 Lithographic apparatus and device manufacturing method 1 2004
7426076 Projection system for a lithographic apparatus 0 2004
* 2006/0139,745 Projection system for a lithograhic apparatus 1 2004
7459247 Lithographic apparatus and device manufacturing method 17 2004
7317510 Lithographic apparatus and device manufacturing method 9 2004
7126672 Lithographic apparatus and device manufacturing method 4 2004
* 2006/0139,600 Lithographic apparatus and device manufacturing method 3 2004
* 2006/0139,980 Lithographic apparatus and device manufacturing method 2 2004
* 2006/0141,373 Lithographic apparatus and device manufacturing method 6 2004
7756660 Lithographic apparatus and device manufacturing method 0 2004
7403865 System and method for fault indication on a substrate in maskless applications 0 2004
7274029 Lithographic apparatus and device manufacturing method 1 2004
7145636 System and method for determining maximum operational parameters used in maskless applications 1 2004
* 2006/0138,358 Lithographic apparatus and device manufacturing method 3 2004
7342644 Methods and systems for lithographic beam generation 2 2004
7253881 Methods and systems for lithographic gray scaling 1 2004
* 2006/0139,609 Methods and systems for lithographic beam generation 0 2004
* 2006/0012,779 Lithographic apparatus and device manufacturing method 3 2005
7242458 Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates 6 2005
* 2006/0139,602 Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates 3 2005
7812930 Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume 1 2005
* 2006/0209,313 Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume 4 2005
7209216 Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography 1 2005
7403265 Lithographic apparatus and device manufacturing method utilizing data filtering 13 2005
* 2006/0221,322 Lithographic apparatus and device manufacturing method utilizing data filtering 4 2005
7728956 Lithographic apparatus and device manufacturing method utilizing multiple die designs on a substrate using a data buffer that stores pattern variation data 3 2005
* 2006/0221,320 Lithographic apparatus and device manufacturing method utilizing multiple die designs on a substrate 5 2005
7330239 Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device 1 2005
7209217 Lithographic apparatus and device manufacturing method utilizing plural patterning devices 2 2005
* 2006/0227,069 Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device 2 2005
7221514 Variable lens and exposure system 5 2005
7738081 Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler 1 2005
* 2006/0252,270 LIthographic apparatus and device manufacturing method utilizing a flat panel display handler 3 2005
7477772 Lithographic apparatus and device manufacturing method utilizing 2D run length encoding for image data compression 1 2005
7197828 Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement 7 2005
* 2006/0269,116 Lithographic apparatus and device manufacturing method utilizing 2D run length encoding for image data compression 9 2005
7742148 Lithographic apparatus and device manufacturing method for writing a digital image 0 2005
7292317 Lithographic apparatus and device manufacturing method utilizing substrate stage compensating 5 2005
* 2006/0279,716 Lithographic apparatus and device manufacturing method utilizing substrate stage compensating 1 2005
* 2006/0281,032 Lithographic apparatus and device manufacturing method for writing a digital image 2 2005
7233384 Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor 5 2005
7321416 Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion 0 2005
7538857 Lithographic apparatus and device manufacturing method utilizing a substrate handler 4 2005
7408617 Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method 1 2005
7965373 Lithographic apparatus and device manufacturing method utilizing a datapath having a balanced calculation load 4 2005
* 2007/0009,146 Lithographic apparatus and device manufacturing method utilizing a datapath having a balanced calculation load 9 2005
7522258 Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination 1 2005
7307694 Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method 1 2005
* 2007/0002,297 Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination 1 2005
* 2007/0002,301 Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method 2 2005
* 2007/0013,889 Lithographic apparatus, device manufacturing method and device manufactured thereby having an increase in depth of focus 4 2005
* 7251019 Lithographic apparatus and device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging 0 2005
* 2007/0019,174 Lithographic apparatus and device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging 3 2005
7606430 Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD 1 2005
* 2007/0045,572 Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD 4 2005
* 2007/0046,917 Lithographic apparatus and device manufacturing method that compensates for reticle induced CDU 1 2005
7332733 System and method to correct for field curvature of multi lens array 1 2005
* 2007/0075,278 System and method to correct for field curvature of multi lens array 1 2005
7830493 System and method for compensating for radiation induced thermal distortions in a substrate or projection system 2 2005
7391503 System and method for compensating for thermal expansion of lithography apparatus or substrate 1 2005
* 2007/0076,180 System and method for compensating for radiation induced thermal distortions 8 2005
* 2007/0075,315 System and method for compensating for thermal expansion of lithography apparatus or substrate 1 2005
7081944 Lithographic projection apparatus and device manufacturing method utilizing two arrays of focusing elements 1 2005
* 2006/0072,093 LITHOGRAPHIC PROJECTION APPARATUS AND DEVICE MANUFACTURING METHOD UTILIZING TWO ARRAYS OF FOCUSING ELEMENTS 0 2005
* 2007/0127,005 Illumination system 3 2005
7626181 Lithographic apparatus and device manufacturing method 4 2005
* 2007/0150,778 Lithographic apparatus and device manufacturing method 4 2005
* 2007/0133,007 Lithographic apparatus and device manufacturing method using laser trimming of a multiple mirror contrast device 2 2005
7440078 Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units 7 2005
* 2007/0153,249 Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure types 4 2005
* 2007/0139,633 Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units 6 2005
7466394 Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array 0 2005
* 2007/0139,637 Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array 0 2005
7656506 Lithographic apparatus and device manufacturing method utilizing a substrate handler 1 2005
7388650 Lithographic apparatus and device manufacturing method 2 2005
* 2006/0158,634 Lithographic apparatus and device manufacturing method utilizing a substrate handler 7 2005
7385677 Lithographic apparatus and device manufacturing method that limits a portion of a patterning device used to pattern a beam 2 2006
7714305 Lithographic apparatus and device manufacturing method 3 2006
* 2007/0150,779 Lithographic apparatus and device manufacturing method 2 2006
7528933 Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement 0 2006
* 2007/0236,675 Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement 2 2006
7508491 Lithographic apparatus and device manufacturing method utilized to reduce quantization influence of datapath SLM interface to dose uniformity 1 2006
* 2007/0242,252 Lithographic apparatus and device manufacturing method utilized to reduce quantization influence of datapath SLM interface to dose uniformity 2 2006
7948606 Moving beam with respect to diffractive optics in order to reduce interference patterns 1 2006
* 2007/0242,253 Moving beam with respect to diffractive optics in order to reduce interference patterns 5 2006
8264667 Lithographic apparatus and device manufacturing method using interferometric and other exposure 1 2006
* 2007/0258,078 Lithographic apparatus and device manufacturing method using interferometric and other exposure 4 2006
7218380 Lithographic apparatus and device manufacturing method 14 2006
* 2006/0232,758 Lithographic apparatus and device manufacturing method 0 2006
7649676 System and method to form unpolarized light 0 2006
7936445 Altering pattern data based on measured optical element characteristics 0 2006
* 2007/0291,240 Altering pattern data based on measured optical element characteristics 6 2006
8896808 Lithographic apparatus and method 0 2006
7593094 Patterning device 0 2006
* 2007/0296,944 Patterning device 0 2006
7324186 Lithographic apparatus and device manufacturing method 1 2006
* 2006/0256,309 Lithographic apparatus and device manufacturing method 1 2006
7548315 System and method to compensate for critical dimension non-uniformity in a lithography system 0 2006
* 2008/0024,744 System and method to compensate for critical dimension non-uniformity in a lithography system 2 2006
7738077 Patterning device utilizing sets of stepped mirrors and method of using same 0 2006
7563562 Lithographic apparatus and device manufacturing method 0 2006
* 2006/0275,709 Lithographic apparatus and device manufacturing method 1 2006
7626182 Radiation pulse energy control system, lithographic apparatus and device manufacturing method 0 2006
* 2008/0054,190 Radiation pulse energy control system, lithographic apparatus and device manufacturing method 0 2006
7628875 MEMS device and assembly method 0 2006
* 2008/0063,830 MEMS device and assembly method 0 2006
8049865 Lithographic system, device manufacturing method, and mask optimization method 1 2006
7239373 Lithographic apparatus and device manufacturing method 5 2006
* 2007/0030,470 Lithographic apparatus and device manufacturing method 0 2006
7791710 System and method for determining maximum operational parameters used in maskless applications 1 2006
* 2007/0030,471 Lithographic apparatus and device manufacturing method using dose control 9 2006
* 2007/0030,472 System and method for determining maximum operational parameters used in maskless applications 6 2006
7522266 Lithographic apparatus and device manufacturing method 1 2006
* 2007/0046,919 Lithographic apparatus and device manufacturing method 1 2006
7738079 Radiation beam pulse trimming 0 2006
7453551 Increasing pulse-to-pulse radiation beam uniformity 1 2006
* 2008/0111,982 Increasing pulse-to-pulse radiation beam uniformity 1 2006
7336343 Lithographic apparatus and device manufacturing method 0 2006
* 2007/0247,606 Illumination system 3 2006
* 2007/0162,781 Lithographic apparatus and device manufacturing method 6 2006
8259285 Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data 2 2006
* 2008/0143,982 Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data 5 2006
7321417 Spatial light modulator, lithographic apparatus and device manufacturing method 6 2006
* 2007/0097,344 Spatial light modulator, lithographic apparatus and device manufacturing method 0 2006
7643128 Large field of view projection optical system with aberration correctability 4 2006
* 2007/0195,304 Large field of view projection optical system with aberration correctability 2 2006
7684009 Lithographic apparatus and device manufacturing method 0 2006
7965380 Lithographic apparatus and device manufacturing method 16 2007
7459710 Lithographic apparatus, method for calibrating and device manufacturing method 0 2007
7428040 Lithographic apparatus and device manufacturing method 0 2007
* 2007/0206,172 Lithographic apparatus and device manufacturing method 1 2007
8009269 Optimal rasterization for maskless lithography 2 2007
7826035 Lithographic apparatus and device manufacturing method 2 2007
* 2007/0165,203 Lithographic apparatus and device manufacturing method 1 2007
8009270 Uniform background radiation in maskless lithography 1 2007
8390787 Lithographic apparatus and device manufacturing method 2 2007
* 2007/0242,246 Lithographic Apparatus and Device Manufacturing Method 2 2007
7460309 Variable lens and exposure system 1 2007
* 2007/0253,070 VARIABLE LENS AND EXPOSURE SYSTEM 4 2007
7714986 Laser beam conditioning system comprising multiple optical paths allowing for dose control 1 2007
* 2008/0304,034 DOSE CONTROL FOR OPTICAL MASKLESS LITHOGRAPHY 1 2007
8692974 Lithographic apparatus and device manufacturing method using pupil filling by telecentricity control 0 2007
8189172 Lithographic apparatus and method 0 2007
7768627 Illumination of a patterning device based on interference for use in a maskless lithography system 3 2007
* 2008/0309,906 Illumination of a Patterning Device Based on Interference for Use in a Maskless Lithography System 2 2007
7826037 Radiation beam pulse trimming 0 2007
* 2008/0111,981 Radiation Beam Pulse Trimming 3 2007
7898646 Using an interferometer as a high speed variable attenuator 1 2007
* 2008/0106,717 Using an Interferometer as a High Speed Variable Attenuator 1 2007
7859647 Lithographic apparatus and device manufacturing method 3 2008
7576834 Lithographic apparatus and device manufacturing method 5 2008
* 2008/0218,718 Lithographic apparatus and device manufacturing method 2 2008
7894041 Limiting a portion of a patterning device used to pattern a beam 1 2008
7864295 Lithographic apparatus and device manufacturing method utilizing data filtering 2 2008
RE43515 Lithographic apparatus and device manufacturing method 1 2008
8169593 Lithographic apparatus and device manufacturing method 0 2008
* 2009/0051,891 Lithographic Apparatus and Device Manufacturing Method 1 2008
8164740 Illumination system coherence remover with two sets of stepped mirrors 1 2008
8159651 Illumination system coherence remover with a series of partially reflective surfaces 0 2008
7911586 Lithographic apparatus and device manufacturing method 0 2009
8937705 Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device 0 2009
8502954 Lithographic apparatus and device manufacturing method 0 2009
8395755 Lithographic apparatus and device manufacturing method 2 2009
* 2009/0284,720 Lithographic Apparatus and Device Manufacturing Method 2 2009
7826672 Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD 0 2009
* 2009/0324,111 Lithographic Apparatus and Device Manufacturing Method Utilizing a Multiple Dictionary Compression Method for FPD 2 2009
8411252 Lithographic apparatus and device manufacturing method utilizing a substrate handler 0 2009
* 2010/0085,553 Lithographic Apparatus and Device Manufacturing Method Utilizing a Substrate Handler 0 2009
8003308 Lithographic apparatus and device manufacturing method for writing a digital image 1 2010
8508715 Lithographic apparatus and device manufacturing method utilizing data filtering 0 2010
RE45284 Lithographic apparatus and device manufacturing method 0 2013
8675175 Lithographic apparatus and device manufacturing method 1 2013
9176392 Lithographic apparatus and device manufacturing method using dose control 0 2014
 
TECHNISCHE UNIVERSITEIT DELFT (1)
7714307 Method of designing a projection system, lithographic apparatus and device manufacturing method 0 2006
 
CARL ZEISS SMT GMBH (2)
* 8970951 Mask inspection microscope with variable illumination setting 0 2010
* 2012/0162,755 MASK INSPECTION MICROSCOPE WITH VARIABLE ILLUMINATION SETTING 3 2010
 
ASML US, LLC (2)
7242456 System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions 1 2004
* 2005/0264,782 System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions 2 2004
 
GEORGIA TECH RESEARCH CORPORATION (2)
* 9019468 Interference projection exposure system and method of using same 0 2011
* 2012/0081,687 INTERFERENCE PROJECTION EXPOSURE SYSTEM AND METHOD OF USING SAME 3 2011
 
ASML HOLDING N.V. (101)
6989920 System and method for dose control in a lithographic system 1 2003
7061591 Maskless lithography systems and methods utilizing spatial light modulator arrays 11 2003
* 2004/0239,908 Maskless lithography systems and methods utilizing spatial light modulator arrays 3 2003
7110082 Optical system for maskless lithography 4 2003
* 2004/0263,813 Projection optical system for maskless lithography 0 2003
7410736 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones 9 2003
* 2005/0068,467 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones 1 2003
7414701 Method and systems for total focus deviation adjustments on maskless lithography systems 2 2003
* 2005/0074,906 Method and systems for total focus deviation adjustments on maskless lithography systems 1 2003
7012674 Maskless optical writer 3 2004
* 2005/0151,953 Maskless optical writer 0 2004
7580559 System and method for calibrating a spatial light modulator 20 2004
* 2005/0168,790 System and method for calibrating a spatial light modulator 53 2004
7153616 System and method for verifying and controlling the performance of a maskless lithography tool 2 2004
* 2005/0219,532 System and method for verifying and controlling the performance of a maskless lithography tool 4 2004
7158215 Large field of view protection optical system with aberration correctability for flat panel displays 12 2004
* 2004/0263,429 Large field of view protection optical system with aberration correctability for flat panel displays 0 2004
6963434 System and method for calculating aerial image of a spatial light modulator 8 2004
* 2005/0243,397 SYSTEM AND METHOD FOR CALCULATING AERIAL IMAGE OF A SPATIAL LIGHT MODULATOR 2 2004
7528963 Method and system for wavefront measurements of an optical system 0 2004
7408651 Method and system for wavefront measurements of an optical system 0 2004
* 2006/0001,890 Spatial light modulator as source module for DUV wavefront sensor 9 2004
7335398 Method to modify the spatial response of a pattern generator 0 2004
7227613 Lithographic apparatus having double telecentric illumination 2 2004
* 2006/0017,902 Lithographic apparatus having double telecentric illumination 9 2004
* 2006/0019,030 System and method to modify the spatial response of a pattern generator 2 2004
7102733 System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool 3 2004
7405802 Large field of view 2X magnification projection optical system for FPD manufacture 1 2004
* 2005/0237,505 Large field of view 2X magnification projection optical system for FPD manufacture 0 2004
* 2005/0046,819 Maskless lithography systems and methods utilizing spatial light modulator arrays 8 2004
6985280 Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography 2 2004
6965436 System and method for calibrating a spatial light modulator array using shearing interferometry 9 2004
* 2005/0168,791 SYSTEM AND METHOD FOR CALIBRATING A SPATIAL LIGHT MODULATOR ARRAY USING SHEARING INTERFEROMETRY 0 2004
* 2005/0094,245 Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography 0 2004
7643192 Pattern generator using a dual phase step element and method of using same 0 2004
7713667 System and method for generating pattern data used to control a pattern generator 1 2004
* 2006/0115,752 System and method for generating pattern data used to control a pattern generator 6 2004
7274502 System, apparatus and method for maskless lithography that emulates binary, attenuating phase-shift and alternating phase-shift masks 0 2004
* 2006/0132,887 System, apparatus and method for maskless lithography that emulates binary, attenuating phase-shift and alternating phase-shift masks 0 2004
7279110 Method and apparatus for creating a phase step in mirrors used in spatial light modulator arrays 0 2004
* 2006/0139,729 Method and apparatus for creating a phase step in mirrors used in spatial light modulator arrays 0 2004
7567368 Systems and methods for minimizing scattered light in multi-SLM maskless lithography 2 2005
* 2006/0146,308 Systems and methods for minimizing scattered light in multi-SLM maskless lithography 2 2005
7542013 System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode 1 2005
* 2006/0170,617 System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode 4 2005
7286137 Method and system for constrained pixel graytones interpolation for pattern rasterization 2 2005
* 2006/0192,789 Method and system for constrained pixel graytones interpolation for pattern rasterization 0 2005
7133121 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region 6 2005
7158238 System and method for calibrating a spatial light modulator array using shearing interferometry 3 2005
7394584 System and method for calculating aerial image of a spatial light modulator 2 2005
* 2005/0243,398 System and method for calculating aerial image of a spatial light modulator 1 2005
7046413 System and method for dose control in a lithographic system 3 2005
* 2005/0270,613 System and method for dose control in a lithographic system 0 2005
7423732 Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane 4 2005
* 2006/0092,396 Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane 1 2005
7372614 Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit 3 2005
7365848 System and method using visible and infrared light to align and measure alignment patterns on multiple layers 1 2005
* 2006/0115,956 System and method using visible and infrared light to align and measure alignment patterns on multiple layers 1 2005
7463402 Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography 1 2006
7403266 Maskless lithography systems and methods utilizing spatial light modulator arrays 1 2006
* 2006/0114,438 Maskless lithography systems and methods utilizing spatial light modulator arrays 2 2006
7548301 Maskless optical writer 0 2006
7532403 Optical system for transforming numerical aperture 1 2006
* 2007/0183,054 Optical system for transforming numerical aperture 6 2006
7839487 Optical system for increasing illumination efficiency of a patterning device 0 2006
7777862 Optical system for increasing illumination efficiency of a patterning device 0 2006
* 2007/0241,292 Optical system for increasing illumination efficiency of a patterning device 1 2006
8934084 System and method for printing interference patterns having a pitch in a lithography system 0 2006
* 2007/0279,642 System and method for printing interference patterns having a pitch in a lithography system 4 2006
7589819 Method for the generation of variable pitch nested lines and/or contact holes using fixed size pixels for direct-write lithographic systems 5 2006
* 2006/0236,295 Method for the generation of variable pitch nested lines and/or contact holes using fixed size pixels for direct-write lithographic systems 9 2006
7697115 Resonant scanning mirror 0 2006
* 2008/0013,097 Resonant scanning mirror 8 2006
7630136 Optical integrators for lithography systems and methods 1 2006
* 2007/0146,672 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region 6 2006
* 2008/0111,977 Compensation techniques for fluid and magnetic bearings 2 2006
8054449 Enhancing the image contrast of a high resolution exposure tool 2 2006
* 2008/0117,399 Enhancing the image contrast of a high resolution exposure tool 0 2006
7965378 Optical system and method for illumination of reflective spatial light modulators in maskless lithography 3 2007
7520626 Pattern generator using a dual phase step element and method of using same 4 2007
7354169 Pattern generator using a dual phase step element and method of using same 4 2007
* 2008/0024,852 Pattern generator using a dual phase step element and method of using same 1 2007
7777861 Methods, systems, and computer program products for printing patterns on photosensitive surfaces 0 2007
* 2008/0079,923 Methods, Systems, and Computer Program Products for Printing Patterns on Photosensitive Surfaces 4 2007
* 2008/0035,057 Method and Apparatus for Creating a Phase Step in Mirrors Used in Spatial Light Modulator Arrays 2 2007
7894140 Compensation techniques for fluid and magnetic bearings 0 2007
7773199 Methods and systems to compensate for a stitching disturbance of a printed pattern 0 2007
7630054 Methods and systems to compensate for a stitching disturbance of a printed pattern 0 2007
* 2008/0094,595 Methods and systems to compensate for a stitching disturbance of a printed pattern 3 2007
* 2008/0094,596 Methods and systems to compensate for a stitching disturbance of a printed pattern 3 2007
7889411 System and method for calculating aerial image of a spatial light modulator 1 2008
7768653 Method and system for wavefront measurements of an optical system 1 2008
7688423 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones 1 2008
* 2009/0033,893 Methods and Systems to Compensate for a Stitching Disturbance of a Printed Pattern in a Maskless Lithography System Not Utilizing Overlap of the Exposure Zones 3 2008
7859756 Optical system for transforming numerical aperture 1 2009
* 2009/0251,786 Optical System for Transforming Numerical Aperture 2 2009
7859735 Systems and methods for minimizing scattered light in multi-SLM maskless lithography 1 2009
* 2010/0002,221 Systems and Methods for Minimizing Scattered Light in Multi-SLM Maskless Lithography 0 2009
RE45511 Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit 1 2010
8634064 Optical system for increasing illumination efficiency of a patterning device by producing a plurality of beams 0 2010
RE46099 Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit 0 2015
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
7499146 Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping 2 2005
* Cited By Examiner