Lighting device for an observation/image pickup apparatus

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United States of America Patent

PATENT NO 5580162
SERIAL NO

08536276

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Abstract

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A lighting device for an observation/image pickup apparatus capable of satisfactorily illuminating a surface of an observed section of a specimen sample for observation irrespective of whether a fine roughness is provided on the specimen surface. Illumination control slit members for laterally projected light, deflected oblique light, vertically projected light, and light composed of laterally projected light and vertically projected light, are provided, and selectively face an illumination light introducing section, to thereby convert illumination light (introduced through the illumination light introducing section) into any desired one of: laterally projected light, deflected oblique light, vertically projected light, and light composed of laterally projected light and vertically projected light, resulting in a surface of an observed section of a specimen sample being illuminated with the converted light.

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Patent Owner(s)

Patent OwnerAddress
SCALAR CORPORATION22-2 NISHI-SHINJUKU-KU 1-CHOME SHINJUKU-KU TOKYO 160-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Murakami, Hajime Chigasaki, JP 87 1341

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