Method for fabricating a planar dielectric

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Dec 10, 1996
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Jun 6, 1995
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Apr 30, 1991

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Abstract

Re-entrant angles in doped dielectrics produced from the decomposition of organo-silicon compounds are reduced or eliminated by the addition of a polar molecule to the dielectric deposition process.

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Patent Owner	Address
LUCENT TECHNOLOGIES INC	600 MOUNTAIN AVENUE MURARY HILL NJ 07974-0636

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Osenbach, John W	Kutztown, PA	74	765

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Method for fabricating a planar dielectric

Number of patents in Portfolio can not be more than 2000

United States of America Patent

08469737

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PATENT NO	5583078
SERIAL NO	08469737
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08469737

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