Multi-level digital micromirror device
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United States of America Patent
Stats
-
Dec 10, 1996
Grant Date -
N/A
app pub date -
Dec 21, 1993
filing date -
Dec 21, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An improved hidden hinge digital micromirror device, and method of making the same, having hinges 424 attached to a yoke 428 which limits the rotation of the device mirror 430. In one embodiment, the mirror 430 is supported by a center support post 416 attached to two torsion hinges 424 by a landing hinge yoke 428. The ends of the torsion hinges 424 are attached to two support posts 426 which hold the hinges 424 above the substrate 400 and allow the hinges 424 to twist in a torsional fashion. The device is fabricated using two sacrificial spacer layers 404, 414 which are removed to allow the mirror 430 to rotate.
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Family
International Classification(s)
Cited Art Landscape
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