Processing apparatus with an invertible collimator and a processing method therefor
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United States of America Patent
Stats
-
Dec 17, 1996
Grant Date -
N/A
app pub date -
Jun 6, 1995
filing date -
Jun 8, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A processing apparatus wherein a collimator which restricts sputtering directions of sputtered particles from a target comprises a plurality of slats arranged substantially parallel with each other. The respective slats constitute a louver mechanism in which rotatable rods are rotated to replace the side thereof facing the target and the side thereof facing the object-to-be-processed with each other. Because of the louver mechanism, the portion of the interior of a processing vessel belonging to the target and the portion thereof belonging to the object-to-be processed can be closed off from each other, and a side of the collimator facing the target and a side thereof facing the object-to-be-processed can be replaced with each other. As a result, the collimator has also a shutter function, and can suppress generation of particles.
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