Importance

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Abstract

An array of M .times.N electrostrictive actuated mirrors for use in an optical projection system manufactured using the inventive method, comprising: an active matrix including a substrate and an array of M.times.N connecting terminals thereon; an array of M.times.N electrostrictive actuators, wherein each of the actuators includes an electrostrictive member having a top and a bottom surfaces, the top surface being separated by a trench thereby creating first top surface and a second top surface, a first electrode located on the bottom surface, a pair of second electrodes, each of the of second electrodes placed on the first and second top surfaces, respectively, and a pair of insulating layers, each covering the first and second top surface, respectively, including the second electrode placed thereon; an array of M.times.N hinges, wherein each of the M.times.N hinges is provided with a flat top surface and a bottom surface having a protrusion mounted on the top of each actuators; an array of M.times.N connecting terminals, wherein each of the connecting terminals is used for electrically connecting each of the first electrodes with the active matrix; and an array of M.times.N mirrors, wherein each of the M.times.N mirrors is mounted on the top surface of each of the M.times.N hinges.

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First Claim