US Patent No: 5,592,023
Number of patents in Portfolio can not be more than 2000
Semiconductor device
Stats
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Jan 7, 1997
Issued date -
Jun 26, 1995
filing date -
08/494,538
serial no -
Expired
status
Importance
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Abstract
A semiconductor device which comprises a first insulator, a first conductor disposed on one side near a semiconductor substrate, a second conductor disposed on the opposite side to the substrate forming a tubular member together with the first conductor, and a second insulator surrounding the member. The first insulator is incorporated into the member, and the member and the first insulator constitute an electrical wiring. Since the wiring is composed of the first insulator and the first and second conductors surrounding the first insulator, an electric current flows the tubular member of the conductors. Therefore, when the device is operated by a high-frequency (for example 80 GHz or more) electric current, apparent increase of the wiring resistance due to the "skin effect" hardly occur and as a result, reduction of the operating speed can be prevented.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 4,833,519 Semiconductor device with a wiring layer having good step coverage for contact holes | 36 | 1987 | |
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| 4,776,087 VLSI coaxial wiring structure | 43 | 1987 | |
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| 5,479,053 Semiconductor device with conductor clad insulator wiring | 10 | 1993 | |
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| 4,581,291 Microminiature coaxial cable and methods manufacture | 20 | 1983 | |