Method and apparatus for determining mis-registration
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United States of America Patent
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Jan 7, 1997
Issued Date -
N/A
app pub date -
Oct 11, 1994
filing date -
Aug 6, 1992
priority date (Note) -
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status (Latency Note)
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Abstract
An image processing apparatus includes a data acquisition stage for acquiring data representative of several spatially separated regions of a sample. The apparatus also includes data storage means for storing reference data corresponding to the sample data. The two sets of data are compiled and analyzed to determine if the sample is shifted from a nominal position.
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