Importance

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Abstract

The workpiece, which is horizontally held in the treatment chamber, is heated by the planar heat generating members disposed on the upper and lower surfaces of the treatment chamber and controlled to predetermined temperature through respective heat equalizing members. Thus, the workpiece can be quickly heated with an equal temperature distribution and high repeatability on the entire surface regardless of the diameter thereof. Further, a stream that is vertically symmetrical is obtained due to the shapes of the shoulder portions. Thus, since an eddy current and a turbulence that tend to take place upon supply of a process gas is prevented, the process gas can be equally contacted to the entire surface of the workpiece.

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First Claim