Apparatus for delivering a silica film forming solution
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United States of America Patent
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-
Feb 4, 1997
Grant Date -
N/A
app pub date -
Sep 27, 1994
filing date -
Oct 7, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A dispensing apparatus for delivering a silica coating solution in a fixed quantity from a liquid container to a surface of a substrate to form a silica film thereon. The liquid container storing the silica coating solution is connected to a diaphragm pump through a suction pipe. The diaphragm pump is connected to a nozzle through a delivery pipe. The coating solution in the liquid container is supplied to the nozzle by sucking and delivering action of the diaphragm pump. The coating solution is discharged from the nozzle to a surface of a substrate supported by a spin chuck of a spin coating apparatus.
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