Substrate holder for a substrate spin treating apparatus
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United States of America Patent
Stats
-
Feb 11, 1997
Grant Date -
N/A
app pub date -
Oct 20, 1994
filing date -
Oct 28, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate holder for use in a substrate spin treating apparatus carries out a desired treatment of a substrate by supplying treating liquid to a surface of the substrate while spinning the substrate. The substrate holder includes a turntable rotatable in a horizontal plane and a motor for rotating the turntable. Support pins are arranged on the turntable for supporting the substrate in a horizontal posture above and spaced from a surface of the turntable. A vertically movable disk of a size at least corresponding to the substrate is disposed between the turntable and the substrate being supported by the support pins. A raising and lowering device is provided for lowering the vertically movable disk to a lower position adjacent the turntable when the turntable is at rest, and raising the vertically movable disk to an upper position adjacent a substrate on the support pins when the turntable is in rotation to effect the treatment.
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