Low surface energy passivation layer for micromechanical devices
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United States of America Patent
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Feb 11, 1997
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N/A
app pub date -
Feb 4, 1994
filing date -
Nov 13, 1990
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Abstract
It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed on a surface of a micromechanical device. When the surface comes in contact with another surface, the oriented monolayer decreases the Van der Waals forces to reduce the attraction between the surfaces.
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