Micromechanical device manufactured out of incompatible materials
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United States of America Patent
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Feb 18, 1997
Issued Date -
N/A
app pub date -
Jun 7, 1995
filing date -
Mar 30, 1994
priority date (Note) -
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Abstract
A method of preventing adhesion of contacting surfaces of micro-mechanical devices (10). Two materials are selected that are incompatible in the sense that they have at least low solid solubility and preferably, an inability to alloy. One of these materials is used as the first contacting surface (11), and the other as the second contacting surface (17).
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