Planar type mirror galvanometer and method of manufacture
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United States of America Patent
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Feb 25, 1997
Grant Date -
N/A
app pub date -
Oct 19, 1995
filing date -
Dec 20, 1993
priority date (Note) -
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Abstract
A slim-type small size mirror galvanometer is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 and a total reflecting mirror 8 provided on an upper face of the movable plate 5. Upper and lower glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, and permanent magnets 10A, 10B and 11A, 11B are fixed to the upper and lower substrates 3, 4 at predetermined locations so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the displacement angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force of the torsion bar 6.
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