Diamond crystal forming method

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United States of America Patent

PATENT NO 5607560
SERIAL NO

08541592

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Abstract

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A diamond crystal forming method with which a diamond crystal is formed on a substrate by a sputtering process uses high-frequency energy in the frequency range of 40 MHz to 250 MHz to form plasma.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 1468501 ?1468501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirabayashi, Keiji Tokyo, JP 28 863
Yamagami, Atsushi Kawasaki, JP 16 723

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