Article formed by in-situ cleaning a Ti target in a Ti+TiN coating process
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United States of America Patent
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Mar 4, 1997
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N/A
app pub date -
Mar 13, 1995
filing date -
Sep 9, 1993
priority date (Note) -
Expired
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Abstract
A novel method of in-situ cleaning a Ti target in a Ti+TiN anti-reflective coating process when such Ti and TiN deposition process are conducted in the same process chamber by the addition of a simple process step and without the use of a shutter.
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