Micro-mechanical device with non-evaporable getter
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United States of America Patent
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Mar 11, 1997
Grant Date -
N/A
app pub date -
Mar 8, 1995
filing date -
Mar 8, 1995
priority date (Note) -
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Abstract
The present invention relates to micro-mechanical devices including actuators, motors and sensors with improved operating characteristics. A micro-mechanical device (10) comprising a DMD-type spatial light modulator with a getter (100) located within the package (52). The getter (100) is preferably specific to water, larger organic molecules, various gases, or other high surface energy substances. The getter is a non-evaporable getter (NEG) to permit the use of active metal getter systems without their evaporation on package surfaces.
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