Probe station having conductive coating added to thermal chuck insulator
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United States of America Patent
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Mar 11, 1997
Grant Date -
N/A
app pub date -
Apr 28, 1995
filing date -
Apr 28, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A probe station suitable for low noise measurements includes a chuck for supporting a test device and a supporting surface for the test device. The probe station has means for controlling the temperature in the vicinity of the test device by sensing the temperature and, in response to the sensing, alternatively raising or lowering the temperature. At least two layers including a first electrically conductive layer adhered to an insulator layer are disposed between the supporting surface and the chuck. The electrically conductive layer is electrically connected to one of the chuck and supporting surface.
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