Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head
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United States of America Patent
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-
Mar 11, 1997
Grant Date -
N/A
app pub date -
Mar 29, 1995
filing date -
Mar 30, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A displacement detecting system includes a scale provided on a surface of a movable object and having a diffraction grating formed along a predetermined direction, a head unit disposed above the surface of the movable object and having a plurality of detection heads, for detecting displacement of the scale in the predetermined direction, the detection heads being disposed along a direction different from the predetermined direction, and a selecting device for selecting at least one detection head out of the detection heads, for detection of a displacement of the scale in the predetermined direction.
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