Displacement detection system

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United States of America Patent

PATENT NO 5610719
SERIAL NO

08500433

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Abstract

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A system for detecting displacement of a surface in a direction normal to the surface, the system including a first grating; a second grating; an optical subsystem for projecting an image of the first grating onto the surface and for directing a secondary image of the first grating reflected off the surface onto the second grating; and a detector, responsive to the fringe pattern formed after the secondary image passes through the second grating, for detecting displacement of the surface in a direction normal to the surface.

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Patent Owner(s)

Patent OwnerAddress
QC OPTICS INC46 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allen, Nicholas Bedford, MA 38 1965
Broude, Sergey Newton Centre, MA 5 131
Broudour, Abdu West Newton, MA 2 82
Chase, Eric Carlisle, MA 21 303
Johnson, Carl Tewksbury, MA 35 593
Miller, Pascal North Chelmsford, MA 18 410
Ormsby, Jay Salem, MA 8 206
Savikovsky, Arkady Brookline, MA 23 806

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