Method for making planar optical waveguides
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United States of America Patent
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Mar 25, 1997
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N/A
app pub date -
Oct 25, 1994
filing date -
Apr 23, 1993
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Abstract
In accordance with the invention a planar waveguide device is fabricated by providing a substrate with an undercladding, depositing a particulate layer of core glass on the undercladding, consolidating the particulate layer by low temperature viscous sintering, patterning the consolidated layer to form an optical waveguide and applying an overcladding. The glass layers can be deposited quickly and economically by slurry dipping, centrifuging or electrophoresis. In a preferred embodiment the substrate is silicon, and the core glass is sodium-boro-silicate.
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